Polymers for microelectronics : resists and dielectrics : developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992 /

Bibliographic Details
Corporate Authors:	American Chemical Society. Division of Polymeric Materials: Science and Engineering, Kōbunshi Gakkai (Japan), American Chemical Society. Meeting
Other Authors:	Thompson, L. F., 1944-, Willson, C. G. (C. Grant), 1939-, Tagawa, Seiichi
Format:	eBook
Language:	English
Published:	Washington, DC : American Chemical Society, 1994.
Series:	ACS symposium series ; 537.
Subjects:	Microelectronics > Materials > Congresses. Polymers > Congresses. Dielectrics > Congresses. Photoresists > Congresses. Microélectronique > Matériaux > Congrès. Polymères > Congrès. Diélectriques > Congrès. Résines photosensibles > Congrès. TECHNOLOGY & ENGINEERING > Mechanical. Photoresists Dielectrics Microelectronics > Materials Polymers Polymeren. Micro-elektronica. Microélectronique > Matériaux. Polymères. Polyimides. Diélectriques. Electronic books. Conference papers and proceedings
Online Access:	Connect to the full text of this electronic book

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