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Micro- and nanopatterning polymers /

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Bibliographic Details
Corporate Authors: American Chemical Society. Division of Polymeric Materials: Science and Engineering, American Chemical Society. Meeting
Other Authors: Ito, Hiroshi, 1946-
Format: eBook
Language:English
Language Notes:English.
Published: Washington, DC : [New York] : American Chemical Society ; Distributed by Oxford University Press, ©1998.
Series:ACS symposium series ; 706.
Subjects:
Microelectronics > Materials > Congresses.
Polymeric composites > Congresses.
Photoresists > Materials > Congresses.
Microelectronics > Materials.
Polymeric composites.
Photoresists > Materials.
Microélectronique > Matériaux.
Composites polymères.
Résines photosensibles > Matériaux.
Microélectronique > Matériaux > Congrès.
Composites polymères > Congrès.
Résines photosensibles > Matériaux > Congrès.
TECHNOLOGY & ENGINEERING > Mechanical.
Microelectronics > Materials
Photoresists > Materials
Polymeric composites
Microélectronique.
Microlithographie.
Polymères.
Résines photosensibles.
Electronic books.
Conference papers and proceedings
Online Access:Connect to the full text of this electronic book
Description
Item Description:Title from PDF title page (ACS publications, viewed August 24, 2009).
"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 214th ACS National Meeting, Las Vegas, Nevada, September 7-11, 1997."
Physical Description:1 online resource (xii, 386 pages) : illustrations
Format:Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
Bibliography:Includes bibliographical references and indexes.
ISBN:9780841216884
0841216886