Micro- and nanopatterning polymers /

Bibliographic Details
Corporate Authors:	American Chemical Society. Division of Polymeric Materials: Science and Engineering, American Chemical Society. Meeting
Other Authors:	Ito, Hiroshi, 1946-
Format:	eBook
Language:	English
Language Notes:	English.
Published:	Washington, DC : [New York] : American Chemical Society ; Distributed by Oxford University Press, ©1998.
Series:	ACS symposium series ; 706.
Subjects:	Microelectronics > Materials > Congresses. Polymeric composites > Congresses. Photoresists > Materials > Congresses. Microelectronics > Materials. Polymeric composites. Photoresists > Materials. Microélectronique > Matériaux. Composites polymères. Résines photosensibles > Matériaux. Microélectronique > Matériaux > Congrès. Composites polymères > Congrès. Résines photosensibles > Matériaux > Congrès. TECHNOLOGY & ENGINEERING > Mechanical. Microelectronics > Materials Photoresists > Materials Polymeric composites Microélectronique. Microlithographie. Polymères. Résines photosensibles. Electronic books. Conference papers and proceedings
Online Access:	Connect to the full text of this electronic book

Available Online