Microelectronics processing : chemical engineering aspects /
| Other Authors: | , |
|---|---|
| Format: | eBook |
| Language: | English |
| Language Notes: | English. |
| Published: |
Washington, DC :
American Chemical Society,
©1989.
|
| Series: | Advances in chemistry series ;
221. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
Table of Contents:
- Microelectronics Processing / Hess, Dennis W., Department of Chemical Engineering, University of California, Berkeley, CA 94720-9989; Jensen, Klavs F., Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, MN 55455
- Theory of Transport Processes in Semiconductor Crystal Growth from the Melt / Brown, Robert A.
- Liquid-Phase Epitaxy and Phase Diagrams of Compound Semiconductors / Anderson, Timothy J.
- Physical Vapor Deposition Reactors / Russell, T. W. Fraser; Baron, Bill N.; Jackson, Scott C., Engineering Department, E. I. du Pont de Nemours and Company, Wilmington, DE 19898; Rocheleau, Richard E., Hawaii Natural Energy Institute, University of Hawaii, Honolulu, HI 96822
- Chemical Vapor Deposition / Jensen, Klavs F.
- Diffusion and Oxidation of Silicon / Fair, Richard B.
- Resists in Microlithography / O'Brien, Michael J., Silicone Products Division, General Electric Company, Waterford, NY 12188; Soane, David S., Department of Chemical Engineering, University of California, Berkeley, CA 94720
- Plasma-Enhanced Etching and Deposition / Hess, Dennis W.; Graves, David B.
- Interconnection and Packaging of High-Performance Integrated Circuits / Jensen, Ronald J.
- Semiconductor Processing Problems Solved by Wet (Solution) Chemistry / Balazs, Marjorie K.