Microelectronics processing : chemical engineering aspects /

Bibliographic Details
Other Authors:	Hess, Dennis W., Jensen, Klavs F., 1952-
Format:	eBook
Language:	English
Language Notes:	English.
Published:	Washington, DC : American Chemical Society, ©1989.
Series:	Advances in chemistry series ; 221.
Subjects:	Microelectronics > Materials. Integrated circuits > Design and construction. Surface chemistry. Electronics. Chemical engineering. Semiconductors. Crystallization. Electronics Chemical Engineering Semiconductors Crystallization Chemical Phenomena Silicon Compounds > chemistry Oxides > chemistry Lithography Microélectronique > Matériaux. Circuits intégrés > Conception et construction. Chimie des surfaces. Électronique. Génie chimique. Semi-conducteurs. Cristallisation. electronic engineering. chemical engineering. semiconductor. crystallization. TECHNOLOGY & ENGINEERING > Mechanical. Chemical engineering Integrated circuits > Design and construction Microelectronics > Materials Surface chemistry Mikroelektronikindustrie Technische Chemie Aufsatzsammlung Electronic books. Aufsatzsammlung.
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