APA (7th ed.) Citation

Hess, D. W., & Jensen, K. F. (1989). Microelectronics processing: Chemical engineering aspects. American Chemical Society.

Chicago Style (17th ed.) Citation

Hess, Dennis W., and Klavs F. Jensen. Microelectronics Processing: Chemical Engineering Aspects. Washington, DC: American Chemical Society, 1989.

MLA (9th ed.) Citation

Hess, Dennis W., and Klavs F. Jensen. Microelectronics Processing: Chemical Engineering Aspects. American Chemical Society, 1989.