Cover Image

Introduction to microlithography : theory, materials, and processing : based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983 /

Bibliographic Details
Corporate Authors: American Chemical Society. Division of Organic Coatings and Plastics Chemistry, American Chemical Society. Meeting
Other Authors: Thompson, L. F., 1944-, Willson, C. G. (C. Grant), 1939-, Bowden, M. J., 1943-
Format: eBook
Language:English
Published: Washington, D.C. : American Chemical Society, 1983.
Series:ACS symposium series ; 219.
Subjects:
Microlithography > Congresses.
Photoresists > Congresses.
Plasma etching > Congresses.
Semiconductors > Etching > Congresses.
Photolithography > Congresses.
Photolithographie > Congrès.
Résines photosensibles > Congrès.
Gravure par plasma > Congrès.
Microlithographie > Congrès.
Semi-conducteurs > Attaque chimique > Congrès.
TECHNOLOGY & ENGINEERING > Mechanical.
Photolithography
Microlithography
Photoresists
Plasma etching
Semiconductors > Etching
Microlithography > Congresses
Photoresists > Congresses
Plasma etching > Congresses
Semiconductors > Etching > Congresses
Electronic books.
Congress
proceedings (reports)
Conference papers and proceedings
Conference papers and proceedings.
Actes de congrès.
Online Access:Connect to the full text of this electronic book
Description
Item Description:Title from PDF title page (ACS publications, viewed September 17, 2009).
Physical Description:1 online resource (ix, 363 pages) : illustrations
Format:Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
Bibliography:Includes bibliographical references and index.
ISBN:9780841210400
0841210403