Introduction to microlithography : theory, materials, and processing : based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983 /

Bibliographic Details
Corporate Authors:	American Chemical Society. Division of Organic Coatings and Plastics Chemistry, American Chemical Society. Meeting
Other Authors:	Thompson, L. F., 1944-, Willson, C. G. (C. Grant), 1939-, Bowden, M. J., 1943-
Format:	eBook
Language:	English
Published:	Washington, D.C. : American Chemical Society, 1983.
Series:	ACS symposium series ; 219.
Subjects:	Microlithography > Congresses. Photoresists > Congresses. Plasma etching > Congresses. Semiconductors > Etching > Congresses. Photolithography > Congresses. Photolithographie > Congrès. Résines photosensibles > Congrès. Gravure par plasma > Congrès. Microlithographie > Congrès. Semi-conducteurs > Attaque chimique > Congrès. TECHNOLOGY & ENGINEERING > Mechanical. Photolithography Microlithography Photoresists Plasma etching Semiconductors > Etching Microlithography > Congresses Photoresists > Congresses Plasma etching > Congresses Semiconductors > Etching > Congresses Electronic books. Congress proceedings (reports) Conference papers and proceedings Conference papers and proceedings. Actes de congrès.
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