APA (7th ed.) Citation

American Chemical Society. Division of Organic Coatings and Plastics Chemistry, American Chemical Society. Meeting, Thompson, L. F., Willson, C. G., & Bowden, M. J. (1983). Introduction to microlithography: Theory, materials, and processing : based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983. American Chemical Society.

Chicago Style (17th ed.) Citation

American Chemical Society. Division of Organic Coatings and Plastics Chemistry, American Chemical Society. Meeting, L. F. Thompson, C. G. Willson, and M. J. Bowden. Introduction to Microlithography: Theory, Materials, and Processing : Based on a Workshop Sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983. Washington, D.C.: American Chemical Society, 1983.

MLA (9th ed.) Citation

American Chemical Society. Division of Organic Coatings and Plastics Chemistry, et al. Introduction to Microlithography: Theory, Materials, and Processing : Based on a Workshop Sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983. American Chemical Society, 1983.