Microelectronics processing : inorganic materials characterization : developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society /
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| Format: | eBook |
| Language: | English |
| Language Notes: | English. |
| Published: |
Washington, DC :
American Chemical Society,
1986.
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| Series: | ACS symposium series ;
295. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
Table of Contents:
- Analytical approaches and expert systems in the characterization of microelectronic devices / D.E. Passoja, Lawrence A. Casper, and A.J. Scharman
- Electrical characterization of semiconductor materials and devices / Dieter K. Schroder
- Dopant profiles by the spreading resistance technique / Robert G. Mazur
- Scanning electron microscopic techniques for characterization of semiconductor materials / Rodney A. Young and Ronald V. Kalin
- Semiconductor materials defect diagnostics for submicrometer very large scale integration technology / G.A. Rozgonyi and D.K. Sadana
- Applications of secondary ion mass spectroscopy to characterization of microelectronic materials / Mary Ryan-Hotchkiss
- Applications of Auger electron spectroscopy in microelectronics / Paul A. Lindfors, Ronald W. Kee, and Douglas L. Jones
- X-ray photoelectron spectroscopy applied to microelectronic materials / William F. Stickle and Kenneth D. Bomben
- Application of neutron depth profiling to microelectronic materials processing / R.G. Downing, J.T. Maki, and R.F. Fleming
- Thermal-wave measurement of thin-film thickness / Allan Rosencwaig
- Characterization of materials, thin films, and interfaces by optical reflectance and ellipsometric techniques / D.E. Aspnes
- Measurement of the oxygen and carbon content of silicon wafers by Fourier transform IR spectrophotometry / Aslan Baghdadi
- Application of the Raman microprobe to analytical problems of microelectronics / Fran Adar
- Characterization of gallium arsenide by magneto-optical photoluminescent spectroscopy / D.C. Reynolds
- Thermal-wave imaging in a scanning electron microscope / Allan Rosencwaig
- Fourier transform mass spectrometry in the microelectronics service laboratory / W.H. Penzel
- Materials characterization using elemental and isotopic analyses by inductively coupled plasma mass spectrometry / B. Shushan, E.S.K. Quan, A. Boorn, D.J. Douglas, and G. Rosenblatt
- Activation analysis of electronics materials / Richard M. Lindstrom
- Trace element survey analyses by spark source mass spectrography / Fredric D. Leipziger and Richard J. Guidoboni
- Characterization of components in plasma phosphorus-doped oxides / Jana Houskova, Kim-Khanh N. Ho, and Marjorie K. Balazs
- Process control of vacuum-deposited nickel-chromium for the fabrication of reproducible thin-film resistors / Vineet S. Dharmadhikari
- Characterization of spin-on glass films as a planarizing dielectric / Satish K. Gupta and Roland L. Chin
- Effects of various chemistries on silicon-wafer cleaning / D. Scott Becker, William R. Schmidt, Charlie A. Peterson, and Don C. Burkman
- Monitoring of particles in gases with a laser counter / C.E. Nowakowski and J.V. Martinez de Pinillos
- Microelectronics processing problem solving : the synergism of complementary techniques / J.N. Ramsey.