Microelectronics processing : inorganic materials characterization : developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society /

Bibliographic Details
Corporate Author: American Chemical Society. Division of Industrial and Engineering Chemistry
Other Authors: Casper, L. A.
Format: eBook
Language:English
Language Notes:English.
Published: Washington, DC : American Chemical Society, 1986.
Series:ACS symposium series ; 295.
Subjects:
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Call Number: TK7874 .M486 1986
 
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TK7874 .M486 1986 Available