Microelectronics processing : inorganic materials characterization : developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society /
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| Format: | eBook |
| Language: | English |
| Language Notes: | English. |
| Published: |
Washington, DC :
American Chemical Society,
1986.
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| Series: | ACS symposium series ;
295. |
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| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Title from PDF title page (ACS publications, viewed September 8, 2009). |
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| Physical Description: | 1 online resource (x, 443 pages) : illustrations |
| Format: | Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. |
| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 9780841211278 0841211272 |