American Chemical Society. Division of Industrial and Engineering Chemistry & Casper, L. A. (1986). Microelectronics processing: Inorganic materials characterization : developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society. American Chemical Society.
Chicago Style (17th ed.) CitationAmerican Chemical Society. Division of Industrial and Engineering Chemistry and L. A. Casper. Microelectronics Processing: Inorganic Materials Characterization : Developed from a Symposium Sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society. Washington, DC: American Chemical Society, 1986.
MLA (9th ed.) CitationAmerican Chemical Society. Division of Industrial and Engineering Chemistry and L. A. Casper. Microelectronics Processing: Inorganic Materials Characterization : Developed from a Symposium Sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society. American Chemical Society, 1986.