Integrated circuits : chemical and physical processing : developed from the winter symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society, University of California--Davis, March 26-27, 1984 /

Bibliographic Details
Corporate Authors:	American Chemical Society. Division of Industrial and Engineering Chemistry, American Chemical Society. Division of Industrial and Engineering Chemistry. Winter Symposium
Other Authors:	Stroeve, Pieter, 1945-
Format:	eBook
Language:	English
Language Notes:	English.
Published:	Washington, D.C. : American Chemical Society, 1985.
Series:	ACS symposium series ; 290.
Subjects:	Integrated circuits > Very large scale integration > Design and construction > Congresses. Semiconductors. Electronics. Computers Semiconductors Electronics Electrical Equipment and Supplies Silicon > chemistry Thermal Diffusion Chlorine > chemistry Oxides > chemistry Germanium > chemistry Circuits intégrés à très grande échelle > Conception et construction > Congrès. Ordinateurs. Semi-conducteurs. Électronique. computers. semiconductor. TECHNOLOGY & ENGINEERING > Mechanical. Integrated circuits > Very large scale integration > Design and construction Electronic books. Conference papers and proceedings
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