Fundamentals of Microelectromechanical Systems (MEMS) /
This textbook is intended for undergraduate seniors and graduate students in electrical, mechanical, and biomedical engineering as well as professional engineers who want to learn MEMS technology. This textbook is aimed to teach design, fabrication and testing of MEMS and contains many questions and...
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| Format: | eBook |
| Language: | English |
| Language Notes: | In English. |
| Published: |
New York, N.Y. :
McGraw-Hill Education,
[2021].
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| Edition: | First edition. |
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| Online Access: | Connect to the full text of this electronic book |
| Summary: | This textbook is intended for undergraduate seniors and graduate students in electrical, mechanical, and biomedical engineering as well as professional engineers who want to learn MEMS technology. This textbook is aimed to teach design, fabrication and testing of MEMS and contains many questions and problems for the students? homework and exams for the sake of in-depth understanding of MEMS as well as problem-solving and/or design skills in MEMS analysis and design. |
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| Physical Description: | 1 online resource (415 pages) : illustrations. Also available in print edition. |
| Format: | Mode of access: Internet via World Wide Web. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781264257591 (e-ISBN) 1264257597 (e-ISBN) 9781264257584 (print-ISBN) 1264257589 (print-ISBN) |