Fundamentals of Microelectromechanical Systems (MEMS) /

This textbook is intended for undergraduate seniors and graduate students in electrical, mechanical, and biomedical engineering as well as professional engineers who want to learn MEMS technology. This textbook is aimed to teach design, fabrication and testing of MEMS and contains many questions and...

Full description

Bibliographic Details

Main Author:	Kim, Eun Sok (Author)
Corporate Author:	McGraw-Hill Companies
Format:	eBook
Language:	English
Language Notes:	In English.
Published:	New York, N.Y. : McGraw-Hill Education, [2021].
Edition:	First edition.
Subjects:	Microelectromechanical systems. Microelectronics > Materials. Electronic books.
Online Access:	Connect to the full text of this electronic book