Effect of titanium (Ti)-seed and in vacuo process flow on sputtered lead zirconate titanate thin films /

Bibliographic Details
Main Author:	Potrepka, Daniel M. (Author)
Format:	Government Document eBook
Language:	English
Published:	Aberdeen Proving Ground, MD : DEVCOM, Army Research Laboratory, Sep 2019.
Series:	Memorandum report ARL-MR ; 1007.
Subjects:	Ferroelectric thin films > Analysis. Sputtering (Physics) X-rays > Diffraction. Electron microscopy. Technical reports.
Online Access:	https://purl.fdlp.gov/GPO/gpo215004

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