Fabrication engineering at the micro- and nanoscale /
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
New York :
Oxford University Press,
[2013].
|
| Edition: | Fourth edition. |
| Series: | Oxford series in electrical and computer engineering.
|
| Subjects: |
| Physical Description: | xiv, 671 pages : illustrations ; 24 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0199861226 9780199861224 |