Fabrication engineering at the micro- and nanoscale /

Bibliographic Details
Main Author:	Campbell, Stephen A., 1954- (Author)
Format:	Book
Language:	English
Published:	New York : Oxford University Press, [2013].
Edition:	Fourth edition.
Series:	Oxford series in electrical and computer engineering.
Subjects:	Semiconductors > Design and construction.

Evans: Media and Reserves (Evans 1st floor)