LIGA and its applications /

Bibliographic Details
Other Authors: Saile, Volker
Format: eBook
Language:English
Published: Weinheim : [Chichester] : Wiley-VCH ; [John Wiley, distributor], ©2009.
Series:Advanced micro & nanosystems ; 7.
Subjects:
Online Access:Connect to the full text of this electronic book
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Published 2009
Book