LIGA and its applications /

Bibliographic Details

Other Authors:	Saile, Volker
Format:	eBook
Language:	English
Published:	Weinheim : [Chichester] : Wiley-VCH ; [John Wiley, distributor], ©2009.
Series:	Advanced micro & nanosystems ; 7.
Subjects:	Microelectromechanical systems. Microtechnology. Micro-Electrical-Mechanical Systems
Online Access:	Connect to the full text of this electronic book