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LIGA and its applications /

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Bibliographic Details
Other Authors: Saile, Volker
Format: eBook
Language:English
Published: Weinheim : [Chichester] : Wiley-VCH ; [John Wiley, distributor], ©2009.
Series:Advanced micro & nanosystems ; 7.
Subjects:
Microelectromechanical systems.
Microtechnology.
Micro-Electrical-Mechanical Systems
Online Access:Connect to the full text of this electronic book
Description
Physical Description:1 online resource (x, 479 pages : : illustrations.)
Bibliography:Includes bibliographical references and index.
ISBN:9783527622573 (electronic bk.)
3527622578 (electronic bk.)