The chemistry of metal CVD /

High purity, thin metal coatings have a variety of important commercial applications, for example, in the microelectronics industry, as catalysts, as protective and decorative coatings as well as in gas-diffusion barriers. This book offers detailed, up- to-date coverage of the chemistry behind the v...

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Bibliographic Details

Other Authors:	Kodas, Toivo T. (Toivo Tarmo), 1958-, Hampden-Smith, Mark J.
Format:	eBook
Language:	English
Published:	Weinheim ; New York : VCH, ©1994.
Subjects:	Electronic circuit design. Chemical vapor deposition. Metallic films. Electronic books.
Online Access:	Connect to the full text of this electronic book