Microsystem technology /
This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health...
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| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
Weinheim ; New York :
Wiley-VCH,
©2001.
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| Online Access: | Connect to the full text of this electronic book |
| Summary: | This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating. |
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| Physical Description: | 1 online resource (xii, 500 pages) : illustrations |
| Bibliography: | Includes bibliographical references (pages 465-483) and index. |
| ISBN: | 9783527613007 3527613005 9783527613014 3527613013 0470035226 9780470035221 |