Microsystem technology /

This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health...

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Bibliographic Details

Main Author:	Menz, W. (Wolfgang)
Other Authors:	Mohr, J. (Jürgen), Paul, Oliver
Format:	eBook
Language:	English
Published:	Weinheim ; New York : Wiley-VCH, ©2001.
Subjects:	Microelectronics. Electronic books.
Online Access:	Connect to the full text of this electronic book