CVD of compound semiconductors : precursor synthesis, development and applications /

Chemical growth methods of electronic materials are the keystone of microelectronic device processing. This book discusses the applications of metalorganic chemistry for the vapor phase deposition of compound semiconductors. Vapor phase methods used for semiconductor deposition and the materials pro...

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Bibliographic Details

Main Author:	Jones, Anthony C.
Other Authors:	O'Brien, Paul (University lecturer)
Format:	eBook
Language:	English
Language Notes:	English.
Published:	Weinheim, Germany ; Cambridge : VCH, ©1997.
Series:	Economies of Asia ; 10.
Subjects:	Compound semiconductors > Design and construction. Chemical vapor deposition. Electronic books.
Online Access:	Connect to the full text of this electronic book