Introduction to microfabrication /
This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer prob...
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| Format: | eBook |
| Language: | English |
| Language Notes: | English. |
| Published: |
Chichester, West Sussex, England ; Hoboken, NJ :
John Wiley & Sons,
2010.
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| Edition: | 2nd ed. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Summary: | This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered. |
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| Physical Description: | 1 online resource (xiv, 518 pages) : illustrations |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781119990413 1119990416 9780470666722 0470666722 9786612777066 6612777060 1119991897 9781119991892 1282777068 9781282777064 |