Introduction to microfabrication /

This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer prob...

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Bibliographic Details

Main Author:	Franssila, Sami
Format:	eBook
Language:	English
Language Notes:	English.
Published:	Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, 2010.
Edition:	2nd ed.
Subjects:	Microelectromechanical systems. Electronic apparatus and appliances. Microfabrication. Micro-Electrical-Mechanical Systems
Online Access:	Connect to the full text of this electronic book