Glancing angle deposition of thin films : engineering the nanoscale /

This book provides a highly practical treatment of GLAD technology, gathering existing procedures, methodologies, and experimental designs into a single, cohesive volume which will be useful both as a ready reference for those in the field and as a definitive guide for those entering it. It covers:...

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Bibliographic Details

Main Author:	Hawkeye, Matthew M.
Other Authors:	Taschuk, Michael T., Brett, Michael J.
Format:	eBook
Language:	English
Published:	Chichester, West Sussex, United Kingdom : Wiley, [2014]
Subjects:	Nanotechnology. Chemical vapor deposition. Nanoelectromechanical systems > Design and construction.
Online Access:	Connect to the full text of this electronic book