Wafer manufacturing : shaping of single crystal silicon wafers /

"A wafer (often from silicon crystals) is a thin slice of semiconducting material, upon which microcircuits are constructed by doping, etching, and deposition of various materials. Generally, they are cut from a semiconductor using a diamond saw, then polished on one or both faces. Wafer slicin...

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Bibliographic Details

Main Authors:	Kao, Imin I. (Author), Chung, Chunhui (Author)
Format:	eBook
Language:	English
Published:	Hoboken, NJ : John Wiley & Sons Ltd, 2021.
Edition:	First edition.
Subjects:	Semiconductor wafers > Design and construction.
Online Access:	Connect to the full text of this electronic book