Ferroelectric dielectrics integrated on silicon /
This book describes up-to-date technology applied to high-K materials for More Than Moore applications, i.e. microsystems applied to microelectronics core technologies. After detailing the basic thermodynamic theory applied to high-K dielectrics thin films including extrinsic effects, this book emph...
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| Format: | eBook |
| Language: | English |
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London : Hoboken, NJ :
ISTE ; Wiley,
2011.
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| Online Access: | Connect to the full text of this electronic book |
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