Ferroelectric dielectrics integrated on silicon /

This book describes up-to-date technology applied to high-K materials for More Than Moore applications, i.e. microsystems applied to microelectronics core technologies. After detailing the basic thermodynamic theory applied to high-K dielectrics thin films including extrinsic effects, this book emph...

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Bibliographic Details

Other Authors:	Defaÿ, Emmanuel
Format:	eBook
Language:	English
Published:	London : Hoboken, NJ : ISTE ; Wiley, 2011.
Subjects:	Ferroelectric thin films. Silicon > Electric properties. Electric batteries > Corrosion.
Online Access:	Connect to the full text of this electronic book