Silicon technologies : ion implantation and thermal treatment /
The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.
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| Format: | eBook |
| Language: | English |
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London : Hoboken, NJ :
ISTE ; Wiley,
2011.
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| Online Access: | Connect to the full text of this electronic book |
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