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Microsensors, MEMS, and smart devices /

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Bibliographic Details
Main Author: Gardner, J. W. (Julian W.), 1958-
Other Authors: Varadan, V. K., 1943-, Awadelkarim, Osama O.
Format: eBook
Language:English
Language Notes:English.
Published: Chichester ; New York : J. Wiley, ©2001.
Subjects:
Microelectromechanical systems.
Detectors.
Intelligent control systems.
Micro-Electrical-Mechanical Systems
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Physical Description:1 online resource (xvi, 503 pages) : illustrations
Format:Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
Bibliography:Includes bibliographical references and index.
ISBN:1601190816
9781601190819
9780470846087
0470846089
0470852194
9780470852194