Microsensors, MEMS, and smart devices /

Bibliographic Details

Main Author:	Gardner, J. W. (Julian W.), 1958-
Other Authors:	Varadan, V. K., 1943-, Awadelkarim, Osama O.
Format:	eBook
Language:	English
Language Notes:	English.
Published:	Chichester ; New York : J. Wiley, ©2001.
Subjects:	Microelectromechanical systems. Detectors. Intelligent control systems. Micro-Electrical-Mechanical Systems Electronic books.
Online Access:	Connect to the full text of this electronic book