Resonant MEMS : fundamentals, implementation and application /
Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of thei...
| Other Authors: | , , , |
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| Format: | eBook |
| Language: | English |
| Published: |
Wiesbaden :
Wiley-VCH Verlag & Co. KGaA,
[2015]
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| Series: | Advanced micro & nanosystems.
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Summary: | Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems. |
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| Physical Description: | 1 online resource : illustrations |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9783527676361 3527676368 9783527676354 352767635X 9783527676347 3527676341 9783527676330 3527676333 3527335455 9783527335459 |