Resonant MEMS : fundamentals, implementation and application /

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of thei...

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Bibliographic Details

Other Authors:	Brand, Oliver, 1964- (Editor), Dufour, Isabelle (Electrical engineer) (Editor), Heinrich, Stephen M. (Editor), Josse, Fabien (Editor)
Format:	eBook
Language:	English
Published:	Wiesbaden : Wiley-VCH Verlag & Co. KGaA, [2015]
Series:	Advanced micro & nanosystems.
Subjects:	Microelectromechanical systems > Design and construction. Microfabrication. Resonance.
Online Access:	Connect to the full text of this electronic book