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Handbook of silicon based mems materials and technologies /

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Bibliographic Details
Corporate Author: Knovel (Firm)
Other Authors: Tilli, Markku (Editor)
Format: eBook
Language:English
Published: Amsterdam : Elsevier, 2020.
Edition:Third edition.
Series:Micro & nano technologies.
Subjects:
Microelectromechanical systems.
Silicon.
Micro-Electrical-Mechanical Systems
Silicon
Microsystèmes électromécaniques.
Silicium.
silicon.
Electronic books.
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