Handbook of silicon based mems materials and technologies /

Bibliographic Details

Corporate Author:	Knovel (Firm)
Other Authors:	Tilli, Markku (Editor)
Format:	eBook
Language:	English
Published:	Amsterdam : Elsevier, 2020.
Edition:	Third edition.
Series:	Micro & nano technologies.
Subjects:	Microelectromechanical systems. Silicon. Micro-Electrical-Mechanical Systems Silicon Microsystèmes électromécaniques. Silicium. silicon. Electronic books.
Online Access:	Connect to the full text of this electronic book