Micro-Nano-Integration ; 7th GMM-Workshop : 22-23 Oct. 2018.

Bibliographic Details
Corporate Authors:	GMM Workshop "Mikro-Nano-Integration" Dortmund, Germany, Knovel (Firm), VDE/VDI-Gesellschaft Mikroelektronik, Mikrosystem- und Feinwerktechnik, Institute of Electrical and Electronics Engineers
Format:	Conference Proceeding eBook
Language:	English
Published:	Berlin, Germany : [VDE Verlag], [2018?]
Subjects:	Nanostructures > Congresses. Microelectronics > Congresses. Nanostructures > Congrès. Microélectronique > Congrès. Microelectronics. Nanostructures. Electronic books. Conference papers and proceedings.
Online Access:	Connect to the full text of this electronic book

Description
Item Description:	Conference venue information taken from conference website. Conference location: Dortmund, Germany.
Physical Description:	1 online resource (various pagings) : illustrations
Bibliography:	Includes bibliographical references.
ISBN:	1523126728 9781523126729