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Micro-Nano-Integration ; 7th GMM-Workshop : 22-23 Oct. 2018.

Bibliographic Details
Corporate Authors: GMM Workshop "Mikro-Nano-Integration" Dortmund, Germany, Knovel (Firm), VDE/VDI-Gesellschaft Mikroelektronik, Mikrosystem- und Feinwerktechnik, Institute of Electrical and Electronics Engineers
Format: Conference Proceeding eBook
Language:English
Published: Berlin, Germany : [VDE Verlag], [2018?]
Subjects:
Nanostructures > Congresses.
Microelectronics > Congresses.
Nanostructures > Congrès.
Microélectronique > Congrès.
Microelectronics.
Nanostructures.
Electronic books.
Conference papers and proceedings.
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