APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers. Journal of micro/nanopatterning, materials, and metrology. SPIE-The International Society of Optical Engineering.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers. Journal of Micro/nanopatterning, Materials, and Metrology. [Bellingham, WA]: SPIE-The International Society of Optical Engineering.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers. Journal of Micro/nanopatterning, Materials, and Metrology. SPIE-The International Society of Optical Engineering.

Warning: These citations may not always be 100% accurate.