Journal of micro/nanopatterning, materials, and metrology.
| Previous Title: | Journal of micro/nanolithography, MEMS, and MOEMS |
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| Corporate Author: | |
| Format: | Journal |
| Language: | English |
| Published: |
[Bellingham, WA] :
SPIE-The International Society of Optical Engineering
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| Subjects: | |
| Online Availability: |
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Available Online
| Call Number: |
TK7874 .J6668 |
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|---|---|---|
| Call Number | Status | Get It |
| TK7874 .J6668 | Available | |