Journal of micro/nanopatterning, materials, and metrology.

Bibliographic Details
Previous Title:	Journal of micro/nanolithography, MEMS, and MOEMS
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Format:	Journal
Language:	English
Published:	[Bellingham, WA] : SPIE-The International Society of Optical Engineering
Subjects:	Microelectronics > Periodicals. Microfabrication > Periodicals. Nanostructured materials > Periodicals. Semiconductor industry > Periodicals. Microelectronics. Microfabrication. Nanostructured materials. Semiconductor industry. Periodicals.
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