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Introduction to spectroscopic ellipsometry of thin film materials : instrumentation, data analysis and applications /

Bibliographic Details
Main Authors: Yin, Xinmao (Author), Wee, Andrew T. S. (Author), Tang, Chi Sin (Author)
Corporate Author: EBSCOhost
Format: eBook
Language:English
Published: Weinheim : Wiley-VCH, [2022]
Subjects:
Thin films > Spectra.
Ellipsometry.
Spectrum analysis.
Couches minces > Spectre.
Ellipsométrie.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Physical Description:1 online resource (x, 187 pages) : illustrations (color, black and white.
Bibliography:Includes bibliographical references and index.
ISBN:9783527833948 (electronic bk.)
3527833943 (electronic bk.)