APA (7th ed.) Citation

Yin, X., Wee, A. T. S., & Tang, C. S. (2022). Introduction to spectroscopic ellipsometry of thin film materials: Instrumentation, data analysis and applications. Wiley-VCH.

Chicago Style (17th ed.) Citation

Yin, Xinmao, Andrew T. S. Wee, and Chi Sin Tang. Introduction to Spectroscopic Ellipsometry of Thin Film Materials: Instrumentation, Data Analysis and Applications. Weinheim: Wiley-VCH, 2022.

MLA (9th ed.) Citation

Yin, Xinmao, et al. Introduction to Spectroscopic Ellipsometry of Thin Film Materials: Instrumentation, Data Analysis and Applications. Wiley-VCH, 2022.

Warning: These citations may not always be 100% accurate.