Silicon Sensors and Actuators : The Feynman Roadmap /

This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judg...

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Bibliographic Details
Corporate Author:	SpringerLink (Online service)
Other Authors:	Vigna, Benedetto (Editor), Ferrarini, Paolo (Editor), Villa, Flavio Francesco (Editor), Lasalandra, Ernesto (Editor), Zerbini, Sarah (Editor)
Format:	eBook
Language:	English
Published:	Cham : Springer International Publishing : Imprint: Springer, 2022.
Edition:	1st ed. 2022.
Subjects:	Electronics. Microtechnology. Microelectromechanical systems. Electronic circuits. Materials. Electronics and Microelectronics, Instrumentation. Microsystems and MEMS. Electronic Circuits and Systems. Materials Engineering. Electronic books.
Online Access:	Connect to the full text of this electronic book

Table of Contents:

1. Silicon as Sensor Material
2. Epitaxial Growth
3. Thin Film Deposition
4. Thin Films Characterization and Metrology
5. Dry silicon etch
6. Lithography
7. HF Release
8. Galvanic growth
9. Wet Etch and Cleaning
10. Piezoelectric materials
11. Wafer to wafer Bonding.-12. Linear and non linear mechanichs in MEMS
13. Inertial sensors
14. Magnetometer
15. MEMS microphones
16. Pressure Sensors
17. Enviromental Sensors
18. Mirror
19. Piezo ink jet printers
20. Speakers
21. Autofocus
22. Electronic sensors front-end
23. Electronic Interfaces for actuators
24. Package
25. Testing
26. Reliability
27. The future of sensor and actuators.