Silicon Sensors and Actuators : The Feynman Roadmap /

This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judg...

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Bibliographic Details

Corporate Author:	SpringerLink (Online service)
Other Authors:	Vigna, Benedetto (Editor), Ferrarini, Paolo (Editor), Villa, Flavio Francesco (Editor), Lasalandra, Ernesto (Editor), Zerbini, Sarah (Editor)
Format:	eBook
Language:	English
Published:	Cham : Springer International Publishing : Imprint: Springer, 2022.
Edition:	1st ed. 2022.
Subjects:	Electronics. Microtechnology. Microelectromechanical systems. Electronic circuits. Materials. Electronics and Microelectronics, Instrumentation. Microsystems and MEMS. Electronic Circuits and Systems. Materials Engineering. Electronic books.
Online Access:	Connect to the full text of this electronic book