Silicon Sensors and Actuators : The Feynman Roadmap /
This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judg...
| Corporate Author: | |
|---|---|
| Other Authors: | , , , , |
| Format: | eBook |
| Language: | English |
| Published: |
Cham :
Springer International Publishing : Imprint: Springer,
2022.
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| Edition: | 1st ed. 2022. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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