Optical lithography : here is why /
This book is aimed at new and experienced engineers, technology managers and senior technicians who want to enrich their understanding of the image formation physics of a lithographic system. Readers will gain knowledge of the basic equations and constants that drive optical lithography, learn the b...
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Bibliographic Details
| Main Author: |
Lin, Burn Jeng, 1942-
(Author) |
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| Format: | Book
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| Language: | English |
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| Published: |
Bellingham, Washington :
SPIE,
[2021].
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| Edition: | Second edition. |
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| Subjects: | |
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