Optical and EUV lithography : a modeling perspective /
"State-of-the-art semiconductor lithography combines the most advanced optical systems of our world with cleverly designed and highly optimized photochemical materials and processes to fabricate micro- and nanostructures that enable our modern information society. The precise fabrication and me...
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Bibliographic Details
| Main Author: |
Erdmann, Andreas
(Author) |
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| Format: | Book
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| Language: | English |
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| Published: |
Bellingham :
SPIE,
[2021]
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| Subjects: | |
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